## A Batching and Scheduling Algorithm for the Diffusion Area

# A Batching and Scheduling Algorithm for the Diffusion Area

### A Batching and Scheduling Algorithm for the Diffusion Area ...

This paper proposes an e cient heuristic algorithm for solving a complex batching and scheduling problem in a di usion area of a semiconductor plant. Di usion is frequently bottleneck in the plant and also one of the most complex areas in terms of number of machines, constraints to satisfy and the large number of lots to manage.

get price### A batching and scheduling algorithm for the diffusion area ...

This paper proposes an efficient heuristic algorithm for solving a complex batching and scheduling problem in a diffusion area of a semiconductor plant. Diffusion is frequently the bottleneck in the plant and also one of the most complex areas in terms of number of machines, constraints to satisfy and the large number of lots to manage.

get price### A Batching and Scheduling Algorithm for the Diffusion Area ...

This paper proposes an efficient heuristic algorithm for solving a complex batching and scheduling problem in a diffusion area of a semiconductor plant. Diffusion is frequently bottleneck in the plant and also one of the most complex areas in terms of number of machines, constraints to satisfy and the large number of lots to manage. The purpose of this study is to investigate an approach to ...

get price### A Batching and Scheduling Algorithm for the Diffusion Area ...

International audienceThis paper proposes an efficient heuristic algorithm for solving a complex batching and scheduling problem in a diffusion area of a semiconductor plant. Diffusion is frequently bottleneck in the plant and also one of the most complex areas in terms of number of machines, constraints to satisfy and the large number of lots ...

get price### A BATCH OPTIMIZATION SOLVER FOR DIFFUSION AREA

Jan 01, 2006 In the literature, batching and scheduling in diffusion areas is mainly performed by dispathing rules (Ibrahim et al., 2003). (Monch and Habenicht, 2003) propose to use a dispatching rule to batch the operations and a genetic algorithm to assign the batches to the equipments.

get price### A batch optimization solver for diffusion area scheduling ...

A Batch Optimization Solver for diffusion area scheduling in semiconductor manufacturing Claude Yugma1 ∗ Christian Artigues2 St´ephane Dauz`ere P´er`es1 Alexandre Derreumaux1 Olivier Sibille3 1´ Ecole des Mines de Saint-Etienne, Centre Microlectronique de Provence - Site Georges Charpak, Avenue des An´emones, Quartier Saint-Pierre, F-13541 Gardanne, France 2 LAAS-CNRS, 7 avenue

get price### A Batch Optimization Solver for diffusion area scheduling ...

CiteSeerX - Document Details (Isaac Councill, Lee Giles, Pradeep Teregowda): This paper presents a method and a software for solving a batching and scheduling problem in the diffusion area of a semiconductor plant, the ATMEL fabrication unit in Rousset, France. The diffusion area is one of the most complex area in the fab. A significant number of lots has to be processed while satisfying ...

get price### Scheduling jobs with ready times and precedence ...

Dec 01, 2014 A batching and scheduling algorithm for the diffusion area in semiconductor manufacturing International Journal of Production Research , 50 ( 8 ) ( 2012 ) , pp. 2118 - 2132 CrossRef View Record in Scopus Google Scholar

get price### Scheduling batches with time constraints in wafer ...

This work proposes and tests an algorithm for batching and dispatching lots along cleaning and diffusion operations of a wafer fab. These are characterised by: 1) time constraints (i.e., the time between the end of an operation 'n' and the start of the operation 'n + q' must be lower than a time limit, in order to guarantee the lots' quality); 2) absence of batching affinity between operations.

get price### Metaheuristics for scheduling jobs with incompatible ...

Dec 29, 2010 10% In this paper, we discuss the scheduling of jobs with incompatible families on parallel batching machines. The performance measure is total weighted tardiness. This research is motivated by a scheduling problem found in the diffusion and oxidation areas of semiconductor wafer fabrication where the machines can be modelled as parallel batch processors. Given that this scheduling

get price### A batching and scheduling algorithm for the diffusion area ...

May 18, 2012 This paper proposes an efficient heuristic algorithm for solving a complex batching and scheduling problem in a diffusion area of a semiconductor plant. Diffusion is frequently the bottleneck in the plant and also one of the most complex areas in terms of number of machines, constraints to satisfy and the large number of lots to manage.

get price### A Batch Optimization Solver for diffusion area scheduling ...

CiteSeerX - Document Details (Isaac Councill, Lee Giles, Pradeep Teregowda): This paper presents a method and a software for solving a batching and scheduling problem in the diffusion area of a semiconductor plant, the ATMEL fabrication unit in Rousset, France. The diffusion area is one of the most complex area in the fab. A significant number of lots has to be processed while satisfying ...

get price### A Batch Optimization Solver for diffusion area scheduling ...

A Batch Optimization Solver for diﬀusion area scheduling in semiconductor manufacturing Claude Yugma1 ∗ Christian Artigues2 St´ephane Dauz`ere P´er`es1 Alexandre Derreumaux1 Olivier Sibille3 1Ecole des Mines de Saint-Etienne, Centre Microlectronique´ de Provence - Site Georges Charpak, Avenue des An´emones, Quartier Saint-Pierre, F-13541 Gardanne, France

get price### Scheduling jobs with ready times and precedence ...

Dec 01, 2014 A batching and scheduling algorithm for the diffusion area in semiconductor manufacturing International Journal of Production Research , 50 ( 8 ) ( 2012 ) , pp. 2118 - 2132 CrossRef View Record in Scopus Google Scholar

get price### Flexible job shop scheduling problem for parallel batch ...

May 01, 2017 A batching and scheduling algorithm for the diffusion area in semiconductor manufacturing Int. J. Prod. Res. , 50 ( 8 ) ( 2012 ) , pp. 2118 - 2132 CrossRef View Record in

get price### Scheduling jobs on a single batch processing machine with ...

May 01, 2013 In the diffusion area, there are diffusion furnaces which can process several jobs simultaneously. Due to the different chemical nature of the processes, only jobs of the same job family can be processed together. A batch is defined as a group of jobs that can be processed at the same time on the same machine . The solution of a single-machine ...

get price### Scheduling batches with time constraints in wafer ...

This work proposes and tests an algorithm for batching and dispatching lots along cleaning and diffusion operations of a wafer fab. These are characterised by: 1) time constraints (i.e., the time between the end of an operation 'n' and the start of the operation 'n + q' must be lower than a time limit, in order to guarantee the lots' quality); 2) absence of batching affinity between operations.

get price### Constraint Programming Approach for Scheduling Jobs with ...

moves, and batching size. The diffusion area manager blames a poor scheduling/dispatching decision made by a computerized system and presents Gantt chart evidence of illogical myopic decisions. The manager orders a manual job reservation based on his own experience to replace the automated dispatching system, hoping for an improvement.

get price### Metaheuristics for scheduling jobs with incompatible ...

Dec 29, 2010 In this paper, we discuss the scheduling of jobs with incompatible families on parallel batching machines. The performance measure is total weighted tardiness. This research is motivated by a scheduling problem found in the diffusion and oxidation areas of semiconductor wafer fabrication where the machines can be modelled as parallel batch processors. Given that this scheduling

get price### Single-machine parallel-batching scheduling with family ...

Jul 01, 2014 A parallel-batching scheduling problem with uniform family due dates is considered. • An FPTAS scheme is proposed for the weighed number of tardy jobs. • An O (n 2)-time algorithm is provided for the unit weight problem. • An O (n log n)-time algorithm is presented for the equal processing time problem.

get price### Ant Colony Optimization Approaches for Scheduling Jobs ...

genetic algorithm (GA) from previous research is performed based on stochastically generated ... This research is motivated by a scheduling problem found in the area of diffusion in a semiconductor wafer fabrication facility (wafer fab). In the diffusion area, there are several ... So far only some preliminary work related to batch scheduling ...

get price### HEURISTIC BASED SCHEDULING SYSTEM FOR DIFFUSION IN ...

ing/scheduling problems, we detail the diffusion area problem below first as a mathematical model, and then discuss our heu-ristic solution technique. 3 LITERATURE REVIEW Although there exist many batching situations in manufacturing, two situations are most commonly studied from the schedul-

get price### An Effective Problem Decomposition Method for Scheduling ...

Diffusion processes in semiconductor fabrication facilities (Fabs) refer to the series of processes from wafer cleaning processes to furnace processes. Most furnace tools are batch tools, with large batch sizes, and have relatively long process times, when compared to the other processes. Strict time window constraints link cleaning processes with furnace processes for quality control.

get price### Scheduling a Bounded Parallel-Batching Machine with ...

Nov 30, 2014 We study a scheduling problem with incompatible job families and rejection on a parallel-batching machine, where the objective is to minimize the makespan of all accepted jobs plus the total penalty of all rejected jobs. We provide a polynomial-time algorithm for the case where all jobs have identical release dates and a pseudo-polynomial-time algorithm for the case where the number of ...

get price### A Batch Optimization Solver for diffusion area scheduling ...

This paper presents a method and a software for solving a batching and scheduling problem in the diffusion area of a semiconductor plant, the ATMEL fabrication unit in Rousset, France. The diffusion area is one of the most complex area in the fab. A significant number of lots has to be processed while satisfying complex equipment process and line management constraints.

get price### Batching, Scheduling, Disjunctive graph, Local search ...

This paper proposes an efficient heuristic algorithm for solving a complex batching and scheduling problem in a diffusion area of a semiconductor plant. Diffusion is frequently bottleneck in the plant and also one of the most complex areas in terms of number of machines, constraints to satisfy and the large number of lots to manage. The purpose of this study is to investigate an approach to ...

get price### Ant Colony Optimization Approaches for Scheduling Jobs ...

genetic algorithm (GA) from previous research is performed based on stochastically generated ... This research is motivated by a scheduling problem found in the area of diffusion in a semiconductor wafer fabrication facility (wafer fab). In the diffusion area, there are several ... So far only some preliminary work related to batch scheduling ...

get price### HEURISTIC BASED SCHEDULING SYSTEM FOR DIFFUSION IN ...

ing/scheduling problems, we detail the diffusion area problem below first as a mathematical model, and then discuss our heu-ristic solution technique. 3 LITERATURE REVIEW Although there exist many batching situations in manufacturing, two situations are most commonly studied from the schedul-

get price### Flexible Job-Shop Scheduling with Batching for ...

Scheduling decisions in the diffusion and cleaning area of a semiconductor manufacturing facility have an important impact on the overall performance of a plant. Consequently, we want to optimize those decisions while taking real-world constraints into account. An important property of machines in this work area is their batching capability: They can perform multiple operations at the same time.

get price### An Effective Problem Decomposition Method for Scheduling ...

Diffusion processes in semiconductor fabrication facilities (Fabs) refer to the series of processes from wafer cleaning processes to furnace processes. Most furnace tools are batch tools, with large batch sizes, and have relatively long process times, when compared to the other processes. Strict time window constraints link cleaning processes with furnace processes for quality control.

get price### A batching and scheduling optimisation for a cutting work ...

batch is not a strong constraint, the standard deviation must stay weak to not create disproportionate batches and smooth the production load. Many method could be used to solve batching problem for example [7] used a genetic algorithm to determine batches. B. Scheduling The second problem is a batch scheduling problem on a

get price### Data Diffusion: Dynamic Resource Provision and Data-Aware ...

design, algorithm, and various policies. 3.1 Falkon and Data Diffusion To enable the rapid execution of many tasks on distributed resources, Falkon combines (1) multi-level scheduling [12, 13] to separate resource acquisition (via requests to batch schedulers) from task dispatch, and (2) a streamlined dispatcher to achieve several

get price### A COMPARISON OF HEURISTICS TO SOLVE A SINGLE

cussed by Yugma et al. (2008) for a scheduling problem in the diffusion area of a wafer fab that includes batching machines with incompatible job families. Kurz and Mason (2008) propose iterative exchanges procedures for a scheduling problem similar to the present problem. Recently, a memetic algorithm is proposed for P batch,incomp,r

get price### Scheduling a Bounded Parallel-Batching Machine with ...

Nov 30, 2014 We study a scheduling problem with incompatible job families and rejection on a parallel-batching machine, where the objective is to minimize the makespan of all accepted jobs plus the total penalty of all rejected jobs. We provide a polynomial-time algorithm for the case where all jobs have identical release dates and a pseudo-polynomial-time algorithm for the case where the number of ...

get price### A Genetic Algorithm for Scheduling Parallel Non-identical ...

A Genetic Algorithm for Scheduling Parallel Non-identical Batch Processing Machines Shubin Xu and James C. Bean Abstract—In this paper, we study the scheduling problem of minimizing makespan on parallel non-identical batch processing machines. We formulate the scheduling problem into an integer programming model. Due to the difﬁculty of the ...

get price### The Shifting Bottleneck Procedure for Job Shop Scheduling ...

A batching and scheduling algorithm for the diffusion area in semiconductor manufacturing International Journal of Production Research, Vol. 50, No. 8 An exact approach for single machine subproblems in shifting bottleneck procedures for job shops with total weighted tardiness objective

get price### An effective problem decomposition method for scheduling ...

Diffusion processes in semiconductor fabrication facilities (Fabs) usually refer to the series of processes from wafer cleaning processes to furnace processes. Most furnace tools are batch tools with large batch sizes and have relatively long process times when compared to the other processes. Strict time window constraints link cleaning processes with furnace processes for quality control.

get price### A hybrid ant colony optimization method for scheduling ...

This paper proposes a hybrid ACO approach to minimize weighted tardiness for a batch-processing machine in diffusion area with incompatible jobs and dynamic arrival time. The method combines ACO algorithm and NACH (Next Arrival Control Heuristic) method, and also puts the batching and scheduling process together.

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